PuolijohdeteollisuusOmron on vakiinnuttanut asemansa maailmanlaajuisena ratkaisuntarjoajana puolijohdeteollisuudessa. Olemme saavuttaneet asemamme pitkäaikaisella yhteistyöllä markkinoiden johtavien konerakentajien, kuten SEMIn, kanssa. Olemme hankkineet tarvittavan tieto-taidon tullaksemme johtavaksi toimittajaksi konerakentajille, jotka käyttävät antureita, logiikoita, liikkeenohjausta, turvajärjestelmiä ja -komponentteja.
Thermal Process
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In thermal processes, such as oxidation diffusion and low pressure CVD, wafers are baked in quartz furnaces to make a thin film or to dope the surface. For high thermal-process quality, accurate and fast temperature control is one of the keys. And Omron offers an ideal algorithm in both its stand alone and programmable-loop temperature controllers.
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Safe operation is also a key issue in thermal processes. The interlock system protects operator and system from excess temperatures and other unsafe conditions. When a machine experiences problems, it has to fail safe and the operator has to be warned simultaneously. We offer a flexible safety control system based on software logic, which can be combined with DeviceNet to save on wiring, a PLC for machine control, and MMI for safety monitoring in the local language. Moreover, it allows you to reduce wiring work and development time for modifications, conforming to SEMI/S2.
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